Pure Cu, CuZr and an Al-alloy were processed by Equal Channel Angular Pressing (ECAP) at room temperature applying route Bc. Microstructure evolution during ECAP and subsequent annealing was investigated. The deformed and annealed states were characterized by EBSD, TEM and microhardness tests. The microstructure variation was recorded and compared to the behavior of conventional cold rolled material. The study revealed a very low thermal stability of ECAP deformed pure Cu samples compared to cold rolled material with same total strain. However, the thermal stability was significantly improved by alloying with Zr. In contrast, ECAP deformed Al-alloy showed higher thermal stability than cold rolled material.