Paper Title:
Fabrication of Iron Oxide Nanostructures by Electron Beam-Induced Deposition
  Abstract

Electron beam induced-deposition (EBID) is a promising technique for fabricating nanometer-sized structures in a position- and size-controlled manner. The resolution of EBID is now reaching down to subnanometers. However, the deposits obtained by EBID contain a large amount of carbon. Thus, carbon reduction techniques are needed. In this study, nanostructures, such as nanowires, were fabricated by EBID using an iron pentacarbonyl precursor. Several techniques to reduce carbon were applied, including post-deposition heat-treatments and the modification of precursor. It was found that the post-deposition heat-treatment in air resulted in a formation of Fe2O3, and that carbon-free Fe3O4 was formed by mixing a small amount of water vapor in the iron pentacarbonyl precursor.

  Info
Periodical
Materials Science Forum (Volumes 561-565)
Main Theme
Edited by
Young Won Chang, Nack J. Kim and Chong Soo Lee
Pages
1101-1104
DOI
10.4028/www.scientific.net/MSF.561-565.1101
Citation
M. Shimojo, M. Takeguchi, K. Mitsuishi, M. Tanaka, K. Furuya, "Fabrication of Iron Oxide Nanostructures by Electron Beam-Induced Deposition", Materials Science Forum, Vols. 561-565, pp. 1101-1104, 2007
Online since
October 2007
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