Paper Title:
Transmission Electron Microscopy Studies of Oxidation of Single Crystal Silicon Carbide at High Temperature
  Abstract

The microstructures of high-temperature oxide scales on the Si-terminated surface and C-terminated surface of 6H-SiC were investigated by transmission electron microscopy (TEM). We found that mechanical polishing caused surface strains, about 100 nm in depth, on both sides of specimens. Mechanically polished specimens were oxidized at 1473 K for 20 h in air. Oxide scales of about 250 nm in thickness were formed on the Si-terminated surface and of about 400 nm on the C-terminated surface. Since the strain regions caused by mechanical polishing were oxidized, strains were no longer observed. As a result, this oxidation condition effectively removed the strains. The oxide scales were identified as amorphous silica on the Si-terminated face, while crystalline oxides and amorphous silica were observed on the C-terminated face.

  Info
Periodical
Materials Science Forum (Volumes 561-565)
Main Theme
Edited by
Young Won Chang, Nack J. Kim and Chong Soo Lee
Pages
2135-2138
DOI
10.4028/www.scientific.net/MSF.561-565.2135
Citation
B. Chayasombat, N. Tarumi, T. Kato, T. Hirayama, K. Sasaki, K. Kuroda, "Transmission Electron Microscopy Studies of Oxidation of Single Crystal Silicon Carbide at High Temperature", Materials Science Forum, Vols. 561-565, pp. 2135-2138, 2007
Online since
October 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Dong Bok Lee, Seung Wan Woo
Abstract:New ceramic composites that consist of the amorphous SiOC matrix having dispersoids of Mo4.8Si3C0.6 and some MoSi2 were synthesized, and...
165
Authors: Cui Li, Wei Qi, Kutsuna Muneharu
Abstract:A zircon coating was applied on the surface of Ti-6Al-4V alloy by plasma spray and its effect on the high temperature tensile properties of...
547
Authors: Eric Caudron, Régis Cueff, Christophe Issartel, N. Karimi, Frédéric Riffard, Sébastien Perrier, Henri Buscail
Abstract:Manganese addition and subsequent yttrium implantation effects on extra low carbon steel were studied by Rutherford Backscattering...
897
Authors: Ju An Zhao
Abstract:A multi-layer coating SiC/ Si - MoSi2 /MoSi2 with good oxidation resistance has been developed by using the slurry-sintering method on the...
1
Authors: Chuan Qiang Yin, Xiu Qin Wei, Yu Hua Xiong, Pan Bing Zhou, Gen Xiang Zhong, Lang Zhou
Chapter 8: Machining
Abstract:Large amounts of silicon dusts, including band saw dusts, grinding dusts and wire saw dusts were generated in photovoltaic industry. Recovery...
669