Paper Title:
Structural and Electrical Properties of ZnO Films on Freestanding Thick Diamond Films
  Abstract

In this paper, ZnO films are deposited on Freestanding Thick Diamond (FTDF) by plasma-assisted Metal Organic Chemical Vapour Deposition (MOCVD). Diethyl zinc, O2, and N2O are applied as precursors and different substrate temperatures are used to achieve high quality ZnO films. The influence of substrate temperature on the properties of ZnO films is systematically investigated by X-ray diffraction, Hall measurements, and electron probe microanalysis. Experimental results demonstrate that ZnO films deposited at 600°C and 73Pa displays fine electrical quality and Zn/O atomic ratio plays an important role in the electrical property of ZnO films.

  Info
Periodical
Materials Science Forum (Volumes 561-565)
Main Theme
Edited by
Young Won Chang, Nack J. Kim and Chong Soo Lee
Pages
2423-2426
DOI
10.4028/www.scientific.net/MSF.561-565.2423
Citation
J. Sun, Y. Z. Bai, J. C. Sun, T. P. Yang, G. T. Du, X. Jiang, "Structural and Electrical Properties of ZnO Films on Freestanding Thick Diamond Films", Materials Science Forum, Vols. 561-565, pp. 2423-2426, 2007
Online since
October 2007
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Su Shia Lin, Jow Lay Huang
Abstract:A radio frequency power (rf) was supplied to ZnO target, and a direct current (dc) power was supplied to Al target for the preparation of...
305
Authors: Sang Moo Park, Takashi Tomemori, Tomoaki Ikegami, Kenji Ebihara
Abstract:High-quality transparent conductive Al-doped ZnO (AZO) thin films were deposited by pulsed laser deposition on quartz glass substrates at...
211
Authors: C.M. Mahajan, A.G. Godbole, S.P. Gumfekar, S.H. Sonawane, M.G. Takwale
Abstract:Nanocrystalline undoped and Al doped ZnO thin films were synthesized by the chemical spray pyrolysis of Zinc acetate and Aluminium chloride...
103
Authors: Bajirao K. Sonawane, Mukesh P. Bhole, Dnyaneshwar S. Patil
Abstract:Single crystalline a-axis Mg doped ZnO thin films (MgxZn1-xO) were successfully prepared by sol-gel spin coating method using Zinc acetate,...
2915
Authors: Chien Chen Diao, Chao Chin Chan, Chia Ching Wu, Cheng Fu Yang
Abstract:“GfE Coating Materials Company” had developed a novel AZOY transparent conducting oxide (TCO) material that used ZnO as raw material and...
653