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Rapid Thermal Processing and beyond: Applications in Semiconductor Processing

Materials Science Forum Volumes 573 - 574

• Papers
• Abstracts

• p375 Conduction Heating in RTP Fast, and Pattern-Independent   [ 1 M ]
  Authors: Ernst Granneman
• p387 Advanced Annealing Schemes for High-Performance SOI Logic Technologies   [ 515 K ]
  Authors: Thomas Feudel
• p403 Model Based Measurement in Advanced Rapid Thermal Processing   [ 287 K ]
  Authors: Christoph Merkl, Rolf Bremensdorfer
• p417 Short Time Thermal Processing: From Electronics via Photonics to Pipe Organs of the 17^th Century   [ 384 K ]
  Authors: Wolfgang Skorupa