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Authors: Andrea E. Pap, Csaba Dücső, Katalin Kamarás, Gábor Battistig, István Bársony
Abstract:The high reactivity of the free silicon surface and its consequence: the “omnipresent” native silicon dioxide hinders the interface...
119
Authors: Yi Ma
Abstract:In this paper, gate dielectric scaling with nitrogen incorporation technologies is reviewed. In key technologies such as thermal...
133
Authors: Olaf Storbeck, Wieland Pethe, Regina Hayn
Abstract:The silicon oxide growth kinetics were investigated for single wafer rapid thermal (RTP) and large batch vertical furnace radical oxidation...
147
Authors: Martin Trentzsch, Christian Golz, Karsten Wieczorek, Rolf Stephan, Tilo Mantei, Boris Bayha, Susanne Ohsiek, Michael Raab, Zsolt Nényei, Wilfried Lerch, Jürgen Niess, Waltraud Dietl, Christoph Kirchner, Georg Roters
Abstract:In this work we present a comprehensive comparison of ultra thin thermally nitrided (TN) to plasma nitrided (PN) gate dielectrics (GD). We...
153
  | Authors: Anton J. Bauer, Martin Lemberger, Tobias Erlbacher, Wenke Weinreich
Abstract:The paper reviews recent progress and current challenges in implementing high-k dielectrics in microelectronics. Logic devices,...
165
Authors: Alexander Gschwandtner
Abstract:Scaling of CMOS structures through the deep sub-micron range and into the nano-scale range (< 100 nm) has posed a number of difficult...
181
Authors: H. Ulrich Ehrke
Abstract:Secondary Ion Mass Spectrometry (SIMS) is frequently used in the characterization of thin films, coatings, diffusion processes, materials...
197
Authors: Silke Paul, Wilfried Lerch
Abstract:This work presents a summary on the use of rapid thermal processing for implant annealing. It gives a short historical overview of rapid...
207
Authors: Bo Lojek
Abstract:Since introducing Rapid Thermal Annealing, there has been disagreement among experimental data of ion-implanted and annealed layers. One...
229
Authors: Hans D. Geiler
Abstract:About 25years after inventing the laser annealing effects of ion implanted semiconductors a summary of the related physical phenomena is...
237
Showing 11 to 20 of 34 Paper Titles