Paper Title
Page
Authors: Jeffrey C. Gelpey, Steve McCoy, Dave Camm, Wilfried Lerch
Abstract:Millisecond annealing (MSA) has been developed over the last several years as a viable approach to achieve the high electrical activation,...
257
Authors: Fuccio Cristiano, El Mehdi Bazizi, Pier Francesco Fazzini, Simona Boninelli, Ray Duffy, Ardechir Pakfar, Silke Paul, Wilfried Lerch
Abstract:In this paper, we investigate the evolution of extended defects during a millisecond Flash anneal after a preamorphising implant. The...
269
Authors: Alberto Martinez-Limia, Peter Pichler, Christian Steen, Silke Paul, Wilfried Lerch
Abstract:In this contribution we illustrate some important features of the development of models for the simulation of advanced annealing processes....
279
Authors: Nicholas E.B. Cowern, Andrew J. Smith, Nicholas S. Bennett, Brian J. Sealy, Russell Gwilliam, Roger P. Webb, Benjamin Colombeau, Silke Paul, Wilfried Lerch, Ardechir Pakfar
Abstract:This paper reviews the physics and the potential application of ion-implanted vacancies for high-performance B-doped ultra-shallow...
295
Authors: Amitabh Jain
Abstract:One of the main materials challenges of the 130 nm silicon technology node was the need to find a processing solution to the anomalous...
305
Authors: Kyoichi Suguro
Abstract:This paper reports on the ultra-rapid thermal annealing of next generation MOSFETs. In ultra-rapid thermal annealing, the most important...
319
Authors: Masataka Kase, Tomonari Yamamoto, Tomohiro Kubo
Abstract:The recent progress of advanced millisecond annealing (MSA) technology is discussed for the application to the advanced logic LSI...
325
Authors: Bartek J. Pawlak, Ray Duffy, An De Keersgieter
Abstract:In this paper the formation strategies for source and drain regions in vertical FinFETs are discussed. The technology challenges are very...
333
Authors: Anne Lauwers, Jorge Kittl, Karen Maex
Abstract:CMOS integration of dual work function phase controlled Ni FUSI with simultaneous silicidation of nMOS (NiSi) and pMOS (Ni-rich) gates on...
341
Authors: Paul J. Timans
Abstract:Radiant energy sources enable rapid and controllable thermal processing of wafers with closed-loop control of wafer temperature. However the...
355
Showing 21 to 30 of 34 Paper Titles