Paper Title:
The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films
  Abstract

In this work, Si-doped DLC films were deposited on stainless steel (316SS) and polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.% SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30 GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the loading curve which was interpreted by finite element simulation and nanoscratching techniques.

  Info
Periodical
Materials Science Forum (Volumes 587-588)
Edited by
António Torres Marques, António Fernando Silva, António Paulo Monteiro Baptista, Carlos Sá, Fernando Jorge Lino Alves, Luís Filipe Malheiros and Manuel Vieira
Pages
839-843
DOI
10.4028/www.scientific.net/MSF.587-588.839
Citation
C. W. Moura e Silva, J. R.T. Branco, M. C. Oliveira, J. M. Antunes, A. Cavaleiro, "The Influence of the Substrate on the Mechanical Properties of Si-Doped DLC Thin Films", Materials Science Forum, Vols. 587-588, pp. 839-843, 2008
Online since
June 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Cheng Wei Li, Masahiko Kato, Keijiro Nakasa
Abstract:Decarburization treatment was carried out on SKD5 tool steel by heating at 1323K for maximum 5.4ks and quenching followed by tempering at...
447
Authors: Yo Seung Song, Young Min Nam, Ku Hyun Lee, Deuk Yong Lee
Abstract:c-BN film was synthesized using ME-ARE on Si substrate. The deposition process was optimized via the Taguchi method. The optimized conditions...
465
Authors: Yao Gen Shen
Abstract:The pattern formation during delamination and buckling in sputter-deposited tungsten thin films under large compressive stresses was...
655
Authors: Marion Bartsch, Iulian Mircea, Jens Suffner, Bernd Baufeld
Abstract:The basic requirement for the use of a ceramic coating is sufficient adhesion to its substrate. A measure of the adhesive properties of a...
183
Authors: Yoshiko Shinhara, Tarou Tokuda, Fumihiro Suzumura, K. Ohtani, Rong Guang Wang, Mitsuo Kido
Abstract:Detection of delamination of a thermally sprayed coating on an SUS304 substrate was carried out nondestructively using electronic speckle...
999