Paper Title:
Experimental Analysis for the Low-Temperature Growth of Poly-Si Films by Using Double Excimer Laser
  Abstract

This paper is to investigate a double splitting excimer laser technique for making poly Si films. In this research, a KrF excimer laser of 248 nm in wavelength is used to irradiate a-Si films of 0.1 m in thickness on glass substrate to produce poly-Si ones. The control parameters are laser intensity (200~500 mJ/cm2), laser pulse number (1~2 shots) and delay time between two shots (one nanosecond). Average grain sizes from SEM photos are used to analyze the effects of these parameters. Firstly, in the excimer laser experiment, different laser fluences are utilized to study the effect on the microstructure of the silicon film. Purely from the viewpoint of heat transfer, the Si film obtains more energy has the slower cooling or solidification rate, which results in the larger grain. From the experimental results, it can be found that the grain size increases until the laser fluence increases up to the critical value of complete melting, which limits the grain growth method of energy increase. In this work, a double-splitting-laser method is proposed. In the method, a laser pulse from an excimer laser is divided into two pulses by a beam splitter. The cyclic optical path is used to control the delay time of the second pulse. Optical mirrors and optical attenuators are utilized to adjust the energy density of these two laser pulses. The delay time between these two pulses is changeable and controlled in the order of nanosecond. The second pulse is applied when the Si film is solidifying after the irradiation of the first one. This could enhance the solidification time and enlarge the grain size of the poly-Si film.

  Info
Periodical
Edited by
Sheng-Jye Hwang and Sen-Yung Lee
Pages
299-305
DOI
10.4028/www.scientific.net/MSF.594.299
Citation
L. S. Chao, Y. R. Chen, "Experimental Analysis for the Low-Temperature Growth of Poly-Si Films by Using Double Excimer Laser", Materials Science Forum, Vol. 594, pp. 299-305, 2008
Online since
August 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Arthur Medvid, Petr M. Lytvyn
411
Authors: Antonela Dima, Massimo Gagliardi, Dun Liu, Walter Perrie, Craig J. Williams, Ivo Rendina, Geoff Dearden, Ken G. Watkins
Abstract:Patterned structures were created by exposing SiO2 sol-gel films containing nano-silicon particles to a Clark MXR CPA-2010 fs laser (387...
101
Authors: Gui Jie Liu, Xin Wang, An Jin Li
Abstract:In offshore jacket platforms, the structural steels are widely used and usually welded connected. This paper presents the welding of 45#...
263
Authors: Omid Tayefeh Ghalehbeygi, Vural Kara, Levent Trabzon, Selcuk Akturk, Huseyin Kizil
Abstract:We fabricated Si Nano-columns by a femtosecond laser with various wavelengths and process parameters, whilst the specimen was submerged in...
15
Authors: A.F.M. Anuar, Yufridin Wahab, M.Z. Zainol, H. Fazmir, M. Najmi, M. Mazalan, M.K. Md Arshad
Abstract:A simple theoretical model and resistor fabrication for calculating the resistance of a polycrystalline silicon thin film is presented. The...
17