Paper Title:
Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation
  Abstract

The key point of this research is to use Linear Velocity Transducer (LVT) to detect the vertical velocity of the stylus probe for the inner-loop damping and transient control of a force actuator. This improvement has been verified by MATLAB simulation and practical implementation of a surface profiler to reduce the hysteresis effect of the force actuator.

  Info
Periodical
Edited by
Sheng-Jye Hwang and Sen-Yung Lee
Pages
363-367
DOI
10.4028/www.scientific.net/MSF.594.363
Citation
J. M. Lin, P. K. Chang, "Eliminating Hysteresis Effect of Force Actuator for Profiler Design with Rate Inner Loop Compensation", Materials Science Forum, Vol. 594, pp. 363-367, 2008
Online since
August 2008
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