Growth of 6H-SiC Single Crystals under Quasi-Equilibrium Conditions |
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| Journal | Materials Science Forum (Volumes 600 - 603) |
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| Volume | Silicon Carbide and Related Materials 2007 |
| Edited by | Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa |
| Pages | 15-18 |
| DOI | 10.4028/www.scientific.net/MSF.600-603.15 |
| Citation | Emil Tymicki et al., 2008, Materials Science Forum, 600-603, 15 |
| Online since | September, 2008 |
| Authors | Emil Tymicki, Krzysztof Grasza, Władysław Hofman, Ryszard Diduszko, Rafał Bożek |
| Keywords | 6H-SiC, Crystal Growth, PVT, Quasi-Equilibrium Condition, Reduction of Micropipe |
| Abstract | Silicon carbide single crystals grown by the seeded physical vapour transport method have been investigated. These crystals were grown on the Si-face (0001) of 6H-SiC seeds. The growth proceeded under quasi-equilibrium conditions with the growth rate in the range 0.05-0.2 mm/h, that was extremely low as compared to used in standard growth processes. The shape and morphology of the crystallization fronts have been studied. Moreover, defects in crystals and wafers cut from these crystals were examined by optical and atomic force microscopy combined with KOH etching and X-Ray diffraction. |
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