Paper Title:
3C-SiC Islands Formation on 6H-SiC(0001) Substrate from a Liquid Phase
  Abstract

Twin-free 3C-SiC layers were recently obtained by Vapour-Liquid-Solid mechanism on a a-SiC(0001) substrate using Si-Ge melt. The formation of cubic layers is rather unexpected since growth from the melt is known to promote lateral growth and should thus give homoepitaxial layers. The study of the early stage of such growth, after a simple contact between the melt and the substrate (without adding propane), reveals the precipitation of 3C-SiC elongated islands upon the substrate surface. The chemical interactions inside the Ge-Si-C ternary phase diagram suggest an initial dissolution of the SiC seed in contact with a Ge-rich melt (below 1200°C). When the Si content of the melt subsequently increases upon heating, the dissolved carbon atoms precipitate on the seed surface under the form of 3C-SiC islands. When propane is added, these islands enlarge and coalesce to form a complete 3C layer.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
203-206
DOI
10.4028/www.scientific.net/MSF.600-603.203
Citation
O. Kim-Hak, M. Soueidan, G. Ferro, O. Dezellus, A. Andreadou, D. Carole, E. K. Polychroniadis, J. C. Viala, "3C-SiC Islands Formation on 6H-SiC(0001) Substrate from a Liquid Phase ", Materials Science Forum, Vols. 600-603, pp. 203-206, 2009
Online since
September 2008
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$32.00
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