Paper Title:
Growth of Crack-Free 100mm-Diameter 4H-SiC Crystals with Low Micropipe Densities
  Abstract

The theromoelastic stress in post-growth SiC crystals has been investigated in order to suppress the cracks which were frequently observed in SiC crystals with larger diameters. Optimizing the temperature distribution in growing crystals lead to reduction of tensile stress components, and thus resulting in crack-free 100mm diameter SiC crystals with micropipe (MP) densities of 0.025/cm2. The concept of process optimization we established is confirmed to be effective to the growth of large diameter SiC crystals with mechanical stability.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
3-6
DOI
10.4028/www.scientific.net/MSF.600-603.3
Citation
M. Nakabayashi, T. Fujimoto, M. Katsuno, N. Ohtani, H. Tsuge, H. Yashiro, T. Aigo, T. Hoshino, H. Hirano, K. Tatsumi, "Growth of Crack-Free 100mm-Diameter 4H-SiC Crystals with Low Micropipe Densities ", Materials Science Forum, Vols. 600-603, pp. 3-6, 2009
Online since
September 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Balaji Raghothamachar, Rafael Dalmau, Michael Dudley, Raoul Schlesser, Dejin Zhuang, Ziad Herro, Zlatko Sitar
Abstract:Using a combination of synchrotron white beam x-ray topography (SWBXT) and high resolution x-ray diffraction (HRXRD), the structural quality...
1521
Authors: Ya Zhe Xing, Yong Li, Chang Jiu Li, Cheng Xin Li, Guan Jun Yang
Abstract:YSZ molten droplets created by plasma spraying were deposited on the YSZ substrate preheated to different temperature from 75oC to 1000oC....
69
Authors: Jong Ha Park, Sae Hee Ryu, Caroline Sun Yong Lee, Yong Ho Choa, Jae Chul Lee, Sung Hoon Ahn
Abstract:We fabricated a crack-free joining of Ni and Al2O3 using a functionally graded method. Because porosity reduction is important, particle...
523
Authors: Marcin Zielinski, Marc Portail, Thierry Chassagne, Sandrine Juillaguet, Hervé Peyre, André Leycuras, Jean Camassel
Abstract:We report on recent advances in liquid phase epitaxial (LPE) conversion of a bulk Si wafer into self standing 3C-SiC. This includes the role...
49
Authors: Xin Zhao, Shi Fu Zhu, Yong Qiang Sun
Abstract:In order to meet the requirements of growing high-quality ZnGeP2, a crystal growth furnace with three-temperature-zone was designed and...
945