Paper Title:
Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer
  Abstract

The polytype structural variations of a set of SiC bulk wafers with different Nitrogen (N) doping levels, prepared by Physical Vapore Deposition (PVD), are studied. The initial growth conditions were used to produce 6H-polytype SiC, which has been approved for the undoped and lightly doped materials. However, when extreme high N-dopants were applied, the obtained wafer was found with 4H- and 15R-polytype features. Our experimental results of HR-TEM and Raman scattering have revealed clearly the polytype transformation, indicating that the inducement of N in the reactor leads to the polytype transformation of the resulted SiC crystal.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
39-42
DOI
10.4028/www.scientific.net/MSF.600-603.39
Citation
J. Chen, S.C. Lien, Y.C. Shin, Z. C. Feng, C.H. Kuan, J.H. Zhao, J.H. Zhao, W. J. Lu, "Occurrence of Polytype Transformation during Nitrogen Doping of SiC Bulk Wafer", Materials Science Forum, Vols. 600-603, pp. 39-42, 2009
Online since
September 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Li Qiong An, Jian Zhang, Min Liu, Sheng Wu Wang
Abstract:Yb3+ and Ho3+ co-doped Lu2O3 nanocrystalline powders were synthesized by a reversestrike co-precipitation method. The as-prepared powders...
521
Authors: Xu Li, Li Guan, Chong Liu, Feng Cong, Zhi Ping Yang
Abstract:In this study, a novel green phosphor Ca2SrAl2O6:Ce3+,Tb3+ were prepared by solid state method. The crystal structure and particle morphology...
1823
Authors: Hong Ying Dong, Kai Ming Huang, Ying Yue Teng, Yan Ping Ren, Zhi Cheng Jia, Zhen Zhu Cao, Wen Ma
Environmental Catalysis and Environmental Friendly Materials
Abstract:TiO2 nano powder doping with Sn4+ was directly synthesized by a low temperature hydrothermal method using tetrabutyl...
1591
Authors: Chun Hong Mu, Ying Li Liu, Yuan Qiang Song, Huai Wu Zhang, Peng Liu
Abstract:CaCu3Ti4O12 presents colossal dielectric permittivity within a large temperature and frequency range, which...
321
Authors: Tie Kun Jia, Fan Zhang, Xiao Feng Wang, Wei Min Wang
Chapter 1: Novel Processing and Manufacturing
Abstract:Zn-doped SnO2 seaflower like hierarchical architectures have been synthesized via a solvothermal synthesis route in the mixed solvents of...
334