Paper Title:
Dots Formation by CVD in the SiC-Si Hetero-System
  Abstract

The formation of dots by CVD in the hetero-system SiC-Si was studied in the two possible ways : Si dots on SiC substrate and SiC dots on Si substrate. The substrates underwent special surface treatment to reveal a network of parallel steps before deposition of the dots. In the Si on SiC case, the dots density on the 8°off 4H-SiC substrate varied in the range 107 – 7x108 cm-2 and mainly depends on the SiH4 flux and the deposition time. The Si dots are in majority aligned along the step edges of the substrate. In the other hetero-system, only propane was introduced in the reactor to performed a localised carbonisation of the Si(111) 1.5°off substrate. The SiC dots obtained at 1200°C have similar density the Si ones but with smaller size.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
571-574
DOI
10.4028/www.scientific.net/MSF.600-603.571
Citation
M. Bechelany, G. Ferro, J. Dazord , D. Cornu, P. Miele, "Dots Formation by CVD in the SiC-Si Hetero-System", Materials Science Forum, Vols. 600-603, pp. 571-574, 2009
Online since
September 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Somchai Thongtem, Pisith Singjai, Titipun Thongtem, Suphaporn Daothong
Abstract:Carbon nanotubes (CNTs) were grown on 304 stainless steel using iron as a catalyst. By using the applied voltages of 4-6 kV, iron wire with...
470
Authors: Zong You Yin, Xiao Hong Tang, Ji Xuan Zhang, Deny Sentosa, Jing Hua Teng, An Yan Du, Mee Koy Chin
Abstract:Morphology and crystal-quality of InAs/In0.53Ga0.47As/InP quantum dots (QDs) grown by metal-organic vapor phase epitaxy (MOVPE) in N2...
17
Authors: Peng Tian, Chong Qing Huang, Wen Hua Luo, Jing Liu
Chapter 2: Opto-Electronics Engineering
Abstract:InAs/GaAs quantum dots structures are grown by meta-organic chemical vapor deposition. The effects of growth temperatures on the structural...
265
Authors: Peng Tian, Chong Qing Huang, Wen Hua Luo, Jing Liu
Chapter 2: Opto-Electronics Engineering
Abstract:Self-assembled InAs/GaAs quantum dots structures with low temperature and high temperature cap layers are grown by meta-organic chemical...
269
Authors: Zeng Lei Liu, Nian Dong Jiao, Zhi Dong Wang, Zai Li Dong, Lian Qing Liu
Chapter 2: Nano and Micro Devices and Systems
Abstract:This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is...
69