Paper Title:
Influence of Annealing on the Al2O3/4H-SiC Interface
| Periodical |
Materials Science Forum (Volumes 600 - 603)
|
| Main Theme |
Silicon Carbide and Related Materials 2007
|
| Edited by |
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa |
| Pages |
767-770 |
| DOI |
10.4028/www.scientific.net/MSF.600-603.767 |
| Citation |
Ulrike Grossner et al., 2008, Materials Science Forum, 600-603, 767 |
| Online since |
September, 2008 |
| Authors |
Ulrike Grossner, Marc Avice, Spyros Diplas, Annett Thøgersen, Jens S. Christensen, Bengt G. Svensson, Ola Nilsen, Helmer Fjellvåg, John F. Watts |
| Keywords |
4H-SiC, ALCVD, Aluminium Oxide, Annealing, Interface, SIMS, TEM, XPS |
| Price |
US$ 28,- |