Paper Title:
A Silicon Carbide Accelerometer for Extreme Environment Applications
  Abstract

A polycrystalline silicon carbide (poly-SiC) surface-micromachined capacitive accelerometer is designed, fabricated and tested. Leveraging the superior thermo-mechanical and chemical resistance properties of SiC, the device is a first step toward cost-effective implementation of a new class of extreme environment accelerometers, for example for high temperature vibration and shock measurements, even thought this initial work is at room temperature. The accelerometer described herein is designed for a range of 5000 g and a bandwidth of 18 kHz, specifications consistent with commercially available piezoelectric devices for high-level mechanical impact measurements. Test results demonstrate the sensor achieving a resolution of 350 mg/√Hz at 1kHz with a sensitivity of 12 μV/g and a bandwidth of 10 kHz at room temperature.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
859-862
DOI
10.4028/www.scientific.net/MSF.600-603.859
Citation
S. Rajgopal, D. Zula, S. Garverick, M. Mehregany, "A Silicon Carbide Accelerometer for Extreme Environment Applications ", Materials Science Forum, Vols. 600-603, pp. 859-862, 2009
Online since
September 2008
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Price
$32.00
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