Paper Title:
An Examination of Material-Related Performance in SiC Heated Elements for IR Emitter and Sensor Applications
  Abstract

Micro-hotplate platforms, including the heating and sensing resistors, are fabricated by surface micromachining techniques from nitrogen-doped, polycrystalline SiC films deposited by low-pressure chemical vapor deposition. The resulting heated elements are operated without the need for metal electrodes. For comparison, platinum is also used as the heating/sensing resistor on top of otherwise similar SiC micro-hotplates. After characterizing the fundamental thermal transient response of the resulting micro-hotplates, accelerated aging tests are carried out by increasing the input power until the heating resistors fail. Material-related kinetic degradation analysis is conducted to estimate the life time of such elements as infrared emitters.

  Info
Periodical
Materials Science Forum (Volumes 600-603)
Edited by
Akira Suzuki, Hajime Okumura, Tsunenobu Kimoto, Takashi Fuyuki, Kenji Fukuda and Shin-ichi Nishizawa
Pages
863-866
DOI
10.4028/www.scientific.net/MSF.600-603.863
Citation
L. Chen, M. Mehregany, "An Examination of Material-Related Performance in SiC Heated Elements for IR Emitter and Sensor Applications ", Materials Science Forum, Vols. 600-603, pp. 863-866, 2009
Online since
September 2008
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Price
$32.00
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