Challenges in Integration of Piezoelectric Ceramics in Micro Electromechanical Systems |
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| Journal | Materials Science Forum (Volume 606) |
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| Volume | Advances in Ceramic Materials |
| Edited by | Ping Xiao and Brian Ralph |
| Pages | 43-50 |
| DOI | 10.4028/www.scientific.net/MSF.606.43 |
| Citation | R.A. Dorey, 2008, Materials Science Forum, 606, 43 |
| Online since | October, 2008 |
| Authors | R.A. Dorey |
| Keywords | Micro-Electromechanical Systems (MEMS), Microsystems, Piezoelectric, Thick Film |
| Abstract | Lead zirconate titanate (PZT) thick films, a few tens of micrometres thick, are of technological interest for integration with microsystems to create micro electromechanical systems (MEMS) with high sensitivity and power output. This paper examines the challenges faced in integrating thick film PZT with other materials to create functional micro devices. Thermal, chemical and mechanical challenges associated with integration will be examined and potential solutions explored. |
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