Nanocrystal Non-Volatile Memory Devices |
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| Journal | Materials Science Forum (Volume 609) |
|---|---|
| Volume | Thin Films and Porous Materials |
| Edited by | N.Gabouze |
| Pages | 1-9 |
| DOI | 10.4028/www.scientific.net/MSF.609.1 |
| Citation | Zs.J. Horváth et al., 2009, Materials Science Forum, 609, 1 |
| Online since | January, 2009 |
| Authors | Zs.J. Horváth, P. Basa |
| Keywords | Chemical Vapour Deposition (CVD), Ion-Implantation, MIS, MNOS, Nanocrystal, Nonvolatile Memory |
| Abstract | The physical background and present status of the application of metal-insulator-silicon structures with semiconductor nanocrystals embedded in the insulator layer for memory purposes is breafly summarized. |
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