Paper Title:
Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures
  Abstract

In this paper, a promising class of optical filters is introduced, based on Al2O3/PS/Si structure. The filters consist of thin layer of aluminium electrochemically oxidized in different aqueous solution, on porous silicon. The spectral sensitivity can be easily varied by Al2O3 thickness. This result is a consequence of refractive index variation of Al2O3 and PS layers, confirmed by ellipsometry measurements.

  Info
Periodical
Edited by
N.Gabouze
Pages
213-219
DOI
10.4028/www.scientific.net/MSF.609.213
Citation
N. Gabouze, K. Ait-Hamouda, "Electrical and Optical Behavior of Al2O3/Porous Silicon/Silicon Structures", Materials Science Forum, Vol. 609, pp. 213-219, 2009
Online since
January 2009
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