Paper Title:
Characterization of a-C:H Thin Films Deposited from C2H4 by PECVD Microwave Discharge
  Abstract

Some investigations on physico-chemical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited from C2H4 precursor have been carried out. The films were elaborated in a Microwave Multipolar Plasma reactor excited at Distributed Electron Cyclotron Resonance (MMP-DECR). The effects of the plasma power on the electrical and structural characteristics of the deposited films have been evaluated. It appeared that for low plasma power ( 400 W), the deposition rate and the hydrogen concentration increases, whereas the Csp2 concentration remains constant. Beyond 400 W, the deposition rate and the hydrogen concentration reach saturation levels and the Csp2 concentration decreases. In contrast, the film density decreased with the increase of the plasma power. Below 400 W, the dielectric constant decreased with the increase of the plasma power, however, beyond 400 W its value remained almost constant. The correlation between film characterization and properties shows that the permittivity is driven by the film density and the film structure.

  Info
Periodical
Edited by
N.Gabouze
Pages
49-52
DOI
10.4028/www.scientific.net/MSF.609.49
Citation
M. Kihel, R. Clergeraux, S. Sahli, D. Escaich, Y. Segui, P. Raynaud, "Characterization of a-C:H Thin Films Deposited from C2H4 by PECVD Microwave Discharge", Materials Science Forum, Vol. 609, pp. 49-52, 2009
Online since
January 2009
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