Titanium dioxide (TiO2) thin film was fabricated on the surface of glass monolayers at room temperature, using KH-550 as self-assembled monolayers (SAMs). The TiO2 gel precursor was characterized with differential scanning calorimetry – thermogravimetry (DSC-TG), and the TiO2 powder was analyzed with X-ray diffraction (XRD). The TiO2 thin film was tested with X-ray fluorescence spectroscopy (XRF). With the application of atomic force microscope (AFM) the surface topography of siloxane layer and TiO2 film were studied. Their hydrophilicities were measured. The transmittance of TiO2 film was detected by using dual beam ultraviolet - visible spectrophotometer. The results show that the TiO2 thin film is in monolayer with nanometer level, the deposition is the anatase structure. TiO2 is deposited on the surface instead of channel or gap of siloxane, the hydrophilicities of TiO2 monolayer film are perfect, and TiO2 monolayer film has a good transmissivity in the visible light area.