Paper Title:
Low-Temperature Plasma Deposition of Diamond-Like Carbon and III Nitride Thin-Films for Photovoltaic Devices
| Periodical | Materials Science Forum (Volumes 610 - 613) |
|---|---|
| Main Theme | Materials Research |
| Edited by | Zhongwei Gu, Yafang Han, Fusheng Pan, Xitao Wang, Duan Weng and Shaoxiong Zhou |
| Pages | 353-356 |
| DOI | 10.4028/www.scientific.net/MSF.610-613.353 |
| Citation | Jin She Yuan et al., 2009, Materials Science Forum, 610-613, 353 |
| Online since | January, 2009 |
| Authors | Jin She Yuan, Ming Yue Wang, Guo Hao Yu |
| Keywords | DLC, Gallium Nitride (GaN), PECVD |
| Price | US$ 28,- |
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Abstract
Low-temperature plasma deposition of diamond-like carbon (DLC) and gallium nitride thin-films grown on Si substrate by PECVD was investigated using atomic force microscopy and reflectance spectra for photovoltaic devices application. It was found that the morphological features of the GaN film depend on the substrates under the optimum deposition conditions. The optical band gap of the films was approximately 5.5eV for PECVD DLC and approximately 3.3 eV for PECVD GaN.
