TiO2/SiO2 complex nanofilm with high transmittance on solar cell glass was prepared by sol-gel method. Particle diameters, surface structures, the thickness of nanofilm and the transmittance of light from 400nm to 1100nm were tested with AFM, UV2550 and other instruments. The mole percents of TiO2 in SiO2 and their ratio influences on the transmittance of glass, aging ability and other properties of nanofilm were investigated. The AFM photos demonstrated that the TiO2/SiO2 film with high transmittance were composed of nanoparticles with 10nm to 30 nm diameters and their structures were meshes with many holes whose diameters were from 300nm to 500nm. The results revealed that as the mole percents of TiO2 in SiO2 increased the transmittance of solar cell glass with TiO2/SiO2 nanofilm decreased but the aging, adhering and wearing abilities increased and as the diameters of nanoparticles decreased the transmittances of solar cell glass with TiO2/SiO2 nanofilm increased under the condition of TiO2/SiO2 nanofilm with meshes of 300nm to 500m diameters of holes. When the mole percents of TiO2 in SiO2 were 0.1%~0.3%, the average diameters of particles in TiO2/SiO2 nanofilm were about 10nm and the structures of TiO2/SiO2 nanofilm were the meshes with many gaps and the diameters of holes were 300nm to 500nm. The increased transmittances were the greatest about 3.6%, increased value of solar cell efficiency about 3.8% and the aging, adhering and wearing abilities of TiO2/SiO2 nanofilm were best for 20 year life through rapid aging tests.