For Ag film used for storage media, it is required to have heat-resistant, anti-constant temperature, anti-constant humidity characteristics and corrosion resistance, while the high reflectivity of Al is maintained. An Ag thin film (additive elements Pd, Cu and P) was produced on glass substrates and various heat treatments were conducted. Then, the fine structure on this thin film was observed by AFM, and fine structure evaluation in the inside was carried out by in-plane diffraction and X-ray diffraction. In addition, residual stress analysis was performed. These results were compared and examined, and the fine structure and physical properties in a metallic thin film were evaluated.