Paper Title:
Long Carrier Lifetime in 4H-SiC Epilayers Using Chlorinated Precursors
  Abstract

In this work we report the measurement of minority carrier lifetimes using the time resolved photoluminescence technique. It was found that 4H-SiC homo-epilayers grown using chlorine-based precursors have longer carrier lifetimes if used in conjunction with a tantalum carbide coated (TaC-coated) graphite susceptor rather than a SiC-coated graphite susceptor. Longer carrier lifetimes were obtained by optimal combinations of precursor gases and susceptor type. The controllable variation in lifetime from 250 ns to 9.9 s was demonstrated.

  Info
Periodical
Materials Science Forum (Volumes 615-617)
Edited by
Amador Pérez-Tomás, Philippe Godignon, Miquel Vellvehí and Pierre Brosselard
Pages
291-294
DOI
10.4028/www.scientific.net/MSF.615-617.291
Citation
A. Shrivastava, P. B. Klein, E.R. Glaser, J. D. Caldwell, A.V. Bolotnikov, T. S. Sudarshan, "Long Carrier Lifetime in 4H-SiC Epilayers Using Chlorinated Precursors", Materials Science Forum, Vols. 615-617, pp. 291-294, 2009
Online since
March 2009
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Price
$32.00
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