Paper Title:
Fast Epitaxial Growth of 4H-SiC and Analysis of Defect Transfer

The transfer and generation of extended defects in 4H-SiC epitaxial growth at a high growth rate are examined. An epilayer with virtually no basal plane dislocations (BPDs) is obtained using 4º off Si-face substrates, although the formation of 3C-polytype inclusions is occasionally observed. The behavior of BPDs and threading screw dislocations (TSDs) in epitaxial growth is also investigated by X-ray topography and transmission electron microscopy, and the propagation of BPDs and conversion and generation of TSDs in the epilayers are discussed.

Materials Science Forum (Volumes 615-617)
Edited by
Amador Pérez-Tomás, Philippe Godignon, Miquel Vellvehí and Pierre Brosselard
H. Tsuchida, M. Ito, I. Kamata, M. Nagano, "Fast Epitaxial Growth of 4H-SiC and Analysis of Defect Transfer", Materials Science Forum, Vols. 615-617, pp. 67-72, Mar. 2009
Online since
March 2009
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Chapter 7: Electrical and Structural Characterization
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