Low Frequency Noise in 4H-SiC MOSFETs
| Periodical | Materials Science Forum (Volumes 615 - 617) |
|---|---|
| Main Theme | Silicon Carbide and Related Materials 2008 |
| Edited by | Amador Pérez-Tomás, Philippe Godignon, Miquel Vellvehí and Pierre Brosselard |
| Pages | 817-820 |
| DOI | 10.4028/www.scientific.net/MSF.615-617.817 |
| Citation | Sergey L. Rumyantsev et al., 2009, Materials Science Forum, 615-617, 817 |
| Online since | March, 2009 |
| Authors | Sergey L. Rumyantsev, Michael S. Shur, Michael E. Levinshtein, Pavel A. Ivanov, John W. Palmour, Mrinal K. Das, Brett A. Hull |
| Keywords | Bulk States, Channel Mobility, Interface States (or Traps), Low-Frequency Noise, Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET) |
| Price | US$ 28,- |
Low-frequency noise in 4H-SiC MOSFETs has been measured for the first time. At drain currents varying from deep subthreshold to strong inversion, the 1/f (flicker) noise dominated at frequencies 1 - 105 Hz. The dependence of relative spectral noise density, , on drain current Id (at a constant drain voltage Vd) differs qualitatively from that in Si MOSFETs. In Si MOSFETs, ~ 1/ in strong inversion, whereas tends to saturate in sub-threshold. In 4H-SiC MOSFETs under study, ~ 1/ over the whole range of currents from deep sub-threshold to strong inversion. Similar noise behavior is often observed in poly- or a-Si TFTs. The effective channel mobility in 4H-SiC MOSFETs, 3 - 7 cm2/Vs, is also as low as that in TFTs. Both noise behavior and transport properties of 4H-SiC MOSFETs are explained, analogously to TFTs, by a high density of localized states (bulk and interface) near the conduction band edge in the ion implanted p-well.