Paper Title:

Low Frequency Noise in 4H-SiC MOSFETs

Periodical Materials Science Forum (Volumes 615 - 617)
Main Theme Silicon Carbide and Related Materials 2008
Edited by Amador Pérez-Tomás, Philippe Godignon, Miquel Vellvehí and Pierre Brosselard
Pages 817-820
DOI 10.4028/www.scientific.net/MSF.615-617.817
Citation Sergey L. Rumyantsev et al., 2009, Materials Science Forum, 615-617, 817
Online since March, 2009
Authors Sergey L. Rumyantsev, Michael S. Shur, Michael E. Levinshtein, Pavel A. Ivanov, John W. Palmour, Mrinal K. Das, Brett A. Hull
Keywords Bulk States, Channel Mobility, Interface States (or Traps), Low-Frequency Noise, Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET)
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Abstract

Low-frequency noise in 4H-SiC MOSFETs has been measured for the first time. At drain currents varying from deep subthreshold to strong inversion, the 1/f (flicker) noise dominated at frequencies 1 - 105 Hz. The dependence of relative spectral noise density, , on drain current Id (at a constant drain voltage Vd) differs qualitatively from that in Si MOSFETs. In Si MOSFETs, ~ 1/ in strong inversion, whereas tends to saturate in sub-threshold. In 4H-SiC MOSFETs under study, ~ 1/ over the whole range of currents from deep sub-threshold to strong inversion. Similar noise behavior is often observed in poly- or a-Si TFTs. The effective channel mobility in 4H-SiC MOSFETs, 3 - 7 cm2/Vs, is also as low as that in TFTs. Both noise behavior and transport properties of 4H-SiC MOSFETs are explained, analogously to TFTs, by a high density of localized states (bulk and interface) near the conduction band edge in the ion implanted p-well.