Silicon Carbide and Related Materials 2008
Materials Science Forum Volumes 615 - 617
doi:10.4028/www.scientific.net/MSF.615-617
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p117
Extended Study of the Step-Bunching Mechanism during the Homoepitaxial Growth of SiC
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895 K
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Authors: Massimo Camarda, Antonino La Magna, Andrea Severino, Francesco La Via
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p121
Dislocations and Triangular Defect in Low-Temperature Halo-Carbon Epitaxial Growth and Selective Epitaxial Growth
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866 K
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Authors: Hrishikesh Das, Galyna Melnychuk, Yaroslav Koshka
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p125
Inverted Pyramid Defects in 4H-SiC Epilayers
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1021 K
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Authors: Amitesh Shrivastava, Peter G. Muzykov, Tangali S. Sudarshan
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p129
PL Imaging Study of In-Grown Stacking Faults in 4H-SiC Epitaxial Layer
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478 K
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Authors: Ryo Hattori, R. Shimizu, I. Chiba, K. Hamano, Tatsuo Oomori
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p133
On-Axis Homoepitaxy on Full 2” 4H-SiC Wafer for High Power Applications
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4 M
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Authors: Jawad Hassan, Peder Bergman, Anne Henry, Pierre Brosselard, Phillippe Godignon, Erik Janzén
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p137
Liquid Phase Epitaxy of 4H-SiC Layers on On-Axis PVT Grown Substrates
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700 K
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Authors: Kazuhiko Kusunoki, Kazuhito Kamei, Nobuyoshi Yashiro, Ryo Hattori
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p141
LPE Growth of Low Doped n-Type 4H-SiC Layer on On-Axis Substrate for Power Device Application
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581 K
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Authors: Ryo Hattori, Kazuhito Kamei, Kazuhiko Kusunoki, Nobuyoshi Yashiro, S. Shimosaki
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p145
High Quality Single Crystal 3C-SiC(111) Films Grown on Si(111)
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1 M
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Authors: Christopher Locke, Ruggero Anzalone, Andrea Severino, Corrado Bongiorno, Grazia Litrico, Francesco La Via, Stephen E. Saddow
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p149
Towards Large Area (111)3C-SiC Films Grown on Off-Oriented (111)Si
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835 K
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Authors: Andrea Severino, Ruggero Anzalone, Corrado Bongiorno, M. Italia, Giuseppe Abbondanza, Massimo Camarda, L.M.S. Perdicaro, Giuseppe Condorelli, Marco Mauceri, Francesco La Via
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p153
A Comparative Study of the Morphology of 3C-SiC Grown at Different C/Si Ratios
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1 M
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Authors: Giovanni Attolini, Bernard Enrico Watts, Matteo Bosi, Francesca Rossi, Ferenc Riesz
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p157
Growth of Single Crystal 3C-SiC(111) on a Poly-Si Seed Layer
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453 K
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Authors: Christopher Locke, Christopher L. Frewin, Jing Wang, Stephen E. Saddow
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p161
Low Temperature Growth of 3C-SiC Film on Si (111) by Plasma Assisted CVD
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247 K
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Authors: Hideki Shimizu, Akira Kato
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p165
P-Type Doping of Epitaxial 3C-SiC Layers on Silicon (001)
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3 M
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Authors: Günter Wagner, M. Schmidbauer, K. Irmscher, P. Tanner, R. Fornari
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p169
Role of Substrate Misorientation in Relaxation of 3C-SiC Layers on Silicon
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786 K
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Authors: Marcin Zielinski, Marc Portail, Sebastien Roy, S. Kret, Thierry Chassagne, M. Nemoz, Yvon Cordier
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p173
Silicon Carbide Crystalline Films Synthesis out of Organosilicon Monomers Vapors in Reactor with Cold Walls
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1 M
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Authors: Boris M. Sinelnikov, Vitaly A. Tarala, Ivan S. Mitchenko