Silicon Carbide and Related Materials 2008
Materials Science Forum Volumes 615 - 617
doi:10.4028/www.scientific.net/MSF.615-617
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p365
Deep Levels Generated by Ion-Implantation in n- and p-Type 4H-SiC
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181 K
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Authors: Koutarou Kawahara, Giovanni Alfieri, Tsunenobu Kimoto
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p369
The Influence of Growth Conditions on the Annealing of Irradiation Induced EH6,7 Defects in 4H-SiC
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463 K
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Authors: Ioana Pintilie, Lars S. Løvlie, K. Irmscher, Günter Wagner, Bengt G. Svensson, Bernd Thomas
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p373
Defects in 4H-SiC Layers Grown by Chloride-Based Epitaxy
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892 K
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Authors: Franziska Christine Beyer, Henrik Pedersen, Anne Henry, Erik Janzén
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p377
Defects Introduced by Electron-Irradiation at Low Temperatures in SiC
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265 K
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Authors: Nguyen Tien Son, Junichi Isoya, Norio Morishita, Takeshi Ohshima, Hisayoshi Itoh, Adam Gali, Erik Janzén
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p381
Characterization of Deep Levels in High-Resistive 6H-SiC by Current Deep Level Transient Spectroscopy
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274 K
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Authors: Masashi Kato, Kosuke Kito, Masaya Ichimura
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p385
Determination of Intrinsic Defects in High-Purity Semi-Insulating 4H-SiC by Discharge Current Transient Spectroscopy
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230 K
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Authors: Hideharu Matsuura, Miyuki Takahashi, Yoshitaka Kagawa, Shoichi Tano, Takayuki Miyake
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p389
Capacitance Spectroscopy Study of Midgap Levels in n-Type SiC Polytypes
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176 K
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Authors: Giovanni Alfieri, Tsunenobu Kimoto
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p393
Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS
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737 K
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Authors: Bernd Zippelius, Michael Krieger, Heiko B. Weber, Gerhard Pensl, Birgit Kallinger, Jochen Friedrich, Bernd Thomas
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p397
Defects in High Energy Ion Irradiated 4H-SiC
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600 K
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Authors: Gaetano Izzo, Grazia Litrico, Andrea Severino, Gaetano Foti, Francesco La Via, Lucia Calcagno
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p401
Photo-EPR Studies on Low-Energy Electron-Irradiated 4H-SiC
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199 K
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Authors: Patrick Carlsson, Nguyen Tien Son, Henrik Pedersen, Junichi Isoya, Norio Morishita, Takeshi Ohshima, Hisayoshi Itoh, Erik Janzén
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p405
Optical Identification of Mo Related Deep Level Defect in 4H and 6H SiC
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200 K
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Authors: Andreas Gällström, Björn Magnusson, Erik Janzén
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p409
Anti-Site Defects are Found at Large Distances from Localised H and He Ion Implantations
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1 M
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Authors: John W. Steeds, N. Peng, W. Sullivan
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p413
Use of Micro-PL to Monitor the Process of Damage Introduction, its Development and Removal by Annealing
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383 K
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Authors: John W. Steeds
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p417
Nanoimaging in SiC and Related Materials: Beyond Surface Morphology to Charge Transport and Physical Parameters Mapping
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1 M
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Authors: Vito Raineri, Filippo Giannazzo, Fabrizio Roccaforte
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p423
Surface Morphology Improvement and Repeatable Doping Characterization of 4H-SiC Epitaxy Grown on 4° Off-Axis 4H-SiC Wafers
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525 K
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Authors: Swapna G. Sunkari, Hrishikesh Das, Carl Hoff, Yaroslav Koshka, Janna R. B. Casady, Jeff B. Casady