Paper Title:
Deposition of High-Tc Superconducting Thin Films by Reactive Magnetron Sputtering of Alloy Targets
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 62-64)
Edited by
J. Barthel et al.
Pages
221-222
DOI
10.4028/www.scientific.net/MSF.62-64.221
Citation
L. Illgen, M. Manzel, K. Steenbeck, E. Steinbeiss, "Deposition of High-Tc Superconducting Thin Films by Reactive Magnetron Sputtering of Alloy Targets", Materials Science Forum, Vols. 62-64, pp. 221-222, 1991
Online since
January 1991
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