Paper Title:
Simulation of Growth Structure of PVD Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 62-64)
Edited by
J. Barthel et al.
Pages
741-742
DOI
10.4028/www.scientific.net/MSF.62-64.741
Citation
J. Musil, J. Prchal, "Simulation of Growth Structure of PVD Thin Films", Materials Science Forum, Vols. 62-64, pp. 741-742, 1991
Online since
January 1991
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Price
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