In2O3(ZnO)3 layered compound was synthesized by 2.45 GHz microwave heating in a solid state reaction. Microwave-processed samples were obtained at low temperature by the enhancement of solid state diffusion and sublimation of the powder bed. Plate-like grain microstructures formed on the bottom part of the pellet, and vicinity of the surface was dense. The plate-like grain was oriented in the ab-plane direction. Compared with a conventional heated sample, the electrical conductivity increased and the band gap energy decreased. In the case of deposition on a silica substrate by microwave heating, the plate-like grain film was synthesized.