Paper Title:
Damaged Layer Analysis for AFM-Based Mechanical Modifications on (100) Si Surface
  Abstract

Micro/Nanofabrication of silicon substrate based on the atomic force microscope (AFM) followed by wet chemical etching was demonstrated. A specially designed cantilever with a diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional Si or Si3N4-based micro cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip, which was found to be a low crystallized amorphous silicon layer. Hence these sequential processes, called tribo nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool. According to our results, it has been clearly known that the damaged layer withstands against aqueous potassium hydroxide solution, while it dissolves in diluted hydro fluoric (DHF) solution.

  Info
Periodical
Materials Science Forum (Volumes 626-627)
Edited by
Dongming Guo, Jun Wang, Zhenyuan Jia, Renke Kang, Hang Gao, and Xuyue Wang
Pages
29-34
DOI
10.4028/www.scientific.net/MSF.626-627.29
Citation
J. W. Park, N. H. Kim, "Damaged Layer Analysis for AFM-Based Mechanical Modifications on (100) Si Surface", Materials Science Forum, Vols. 626-627, pp. 29-34, 2009
Online since
August 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xiao Li Zhao, Shen Dong, Ying Chun Liang, T. Sun, Yong Da Yan
Abstract:Atom Force Microscopy (AFM) can be employed to create surfaces in Si substrate with recessed features. The resulting patterns can serve as...
762
Authors: Hak Joo Lee, Jae Hyun Kim, Ki Ho Cho, Seung Min Hyun, Jung Yup Kim, Young Eun Yoo, Wan Doo Kim
Abstract:We have developed a novel atomic force microscope (AFM) probe as a highly sensitive sensor and an application of the probe into various...
2253
Authors: Wen Guo, Ya Yang, Jun Jie Qi, Yue Zhang
Abstract:We report the poly(3iophene) (P3HT)/ZnO nanobelt hybrid p-n junction diodes characterized by using a conductive atomic force microscope...
1158
Authors: Lan Zhang, Atsushi Hosoi, Yang Ju
Abstract:Using the microwave atomic force microscope (M-AFM) measuring system, the sample of Au nanowires arranged on glass wafer was sensed with...
200
Authors: Zeng Lei Liu, Nian Dong Jiao, Zhi Dong Wang, Zai Li Dong, Lian Qing Liu
Chapter 2: Nano and Micro Devices and Systems
Abstract:This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is...
69