Paper Title:
Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film
  Abstract

Sputter deposited Fe0.7Co0.3 nitride thin film had zinc blende structure. It was thermally decomposed completely back to the ferromagnetic Fe0.7Co0.3 alloy above 400°C. As-deposited nitride thin films obtained in cosputtering of (Fe0.7Co0.3)1-xAlx composite target with nitrogen sputter gas were solid solutions with zinc blende (x≤0.44) and wurtzite (x>0.5) type structure, respectively. The largest magneto resistance ratio of 0.24% was observed on the Fe0.7Co0.3 alloy particles dispersed in AlN thin film obtained by thermal decomposition of the nitride solid solution with x=0.66 at 500°C.

  Info
Periodical
Materials Science Forum (Volumes 631-632)
Edited by
Akira Kawasaki, Akinaga Kumakawa and Masayuki Niino
Pages
327-331
DOI
10.4028/www.scientific.net/MSF.631-632.327
Citation
K. Sakon, Y. Hirokawa, Y. Masubuchi, S. Kikkawa, "Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film", Materials Science Forum, Vols. 631-632, pp. 327-331, 2010
Online since
October 2009
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$32.00
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