Paper Title:
Large Surface Area of HMDS Plasma Polymerized Thin Film Used for Production of Miniaturized Structures
  Abstract

The aim of this work was the production of a large surface area of hexamethyldisilazane (HMDS) plasma-deposited thin films and their applicability in a miniaturized structure useful for preliminary analysis of organic mixtures. The HMDS plasma films were produced with different surface areas and morphologies, and all films adsorbed polar and non-polar organic compounds. A low cost miniaturized structure was manufactured in glass using a Milling cutter and covered with HMDS plasma films. Good agreement was observed between simulation and experimental results on those microstructures. The observed different performance between pure and mixtures of organic compound samples suggests that the proposed system is a simple setup that could be useful for rough analysis of a fuel.

  Info
Periodical
Materials Science Forum (Volumes 636-637)
Edited by
Luís Guerra ROSA and Fernanda MARGARIDO
Pages
1065-1072
DOI
10.4028/www.scientific.net/MSF.636-637.1065
Citation
L. M. Silva, R. R. Lima, E.R. Fachini, E.W. Simões, E. Pecoraro, M. L. P. Silva, "Large Surface Area of HMDS Plasma Polymerized Thin Film Used for Production of Miniaturized Structures", Materials Science Forum, Vols. 636-637, pp. 1065-1072, 2010
Online since
January 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Keun Woo Lee, Keun Jun Kim, Woo Ho Jeong, Tae Yong Park, Hyeong Tag Jeon
Abstract:Co thin films were deposited by remote plasma atomic layer deposition (ALD) method using dicobalt hexacarbonyl t-butylacetylene...
359
Authors: Roberto R. Lima, E.R. Fachini, Lilian Marques Silva, E.Y. Matsuy, E. Pecoraro, Maria Lucia Pereira Silva
Abstract:The aim of this work was to produce, to characterize and test selective membranes based on derivatives from organic fluorinated/silicon...
1073
Authors: Jian Bing Meng, Xiao Juan Dong, Wen Ji Xu
Abstract:A three-dimensional axisymmetric mathematical model, including the influence of the swirl exiting in the plasma torch, was developed to...
708
Authors: Yu Tong, Tian Wen Guo, Jing Wang, Hai Feng Liang, Mi Qian
Abstract:The commercially pure(CP) titanium specimens were modified with Direct current(DC) plasma nitriding and arc ion plating of TiN film. The...
1050
Authors: Chen Li, Li Zhang, Kai Wang
Abstract:The PANI-CNTs composite material was synthesized through emulsion polymerization, and then the composite had been modified by the oxygen...
1635