Paper Title:
Piezoelectric PZT Thin Films on Flexible Copper-Coated Polymer Films
  Abstract

This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on copper-coated polymer films. PZT thin film deposition was performed onto the metallized Kapton® films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiO2-x seeding layer was sputter-deposited prior to PZT deposition. The film texture was a mixture of (111)-oriented perovskite nanocrystals, rutile and pyrochlore. Topography and piezoelectric in-plane and out-of-plane response of the films were evaluated using a commercial AFM adapted for piezoforce measurements. The as-deposited films were self-polarized with polarization pointing at the surface of the sample. Polarization was switchable and a piezoelectric hysteresis was obtained.

  Info
Periodical
Materials Science Forum (Volumes 636-637)
Edited by
Luís Guerra ROSA and Fernanda MARGARIDO
Pages
392-397
DOI
10.4028/www.scientific.net/MSF.636-637.392
Citation
G. Suchaneck, O. Volkonskiy, G. Gerlach, Z. Hubička, A. Dejneka, L. Jastrabik, D. Kiselev, I. Bdikin, A. L. Kholkin, "Piezoelectric PZT Thin Films on Flexible Copper-Coated Polymer Films", Materials Science Forum, Vols. 636-637, pp. 392-397, 2010
Online since
January 2010
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$32.00
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