Paper Title:
Novel MEMS Fabry-Perot Interferometric Pressure Sensors
  Abstract

A novel design for a Fabry-Perot Interferometric Sensor (FPIS) consisting of a Fabry-Perot cavity formed between two bonded surfaces is discussed. The Fabry-Perot cavity and the optical fiber to which it is coupled are used as the sensing element and interconnect, respectively. The Fabry-Perot cavity is fabricated using the Micro Electro Mechanical Systems (MEMS) technology. The introduction of a center rigid body diaphragm gives this sensor considerable advantage when compared with previous Fabry-Perot cavity based sensors.

  Info
Periodical
Materials Science Forum (Volumes 638-642)
Main Theme
Edited by
T. Chandra, N. Wanderka, W. Reimers , M. Ionescu
Pages
1009-1014
DOI
10.4028/www.scientific.net/MSF.638-642.1009
Citation
I. Padron, A. T. Fiory, N. M. Ravindra, "Novel MEMS Fabry-Perot Interferometric Pressure Sensors", Materials Science Forum, Vols. 638-642, pp. 1009-1014, 2010
Online since
January 2010
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