Shape Memory Behavior of Ti-Ni-X (X= Pd, Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering
| Periodical | Materials Science Forum (Volumes 638 - 642) |
|---|---|
| Main Theme | THERMEC 2009 |
| Edited by | T. Chandra, N. Wanderka, W. Reimers , M. Ionescu |
| Pages | 2068-2073 |
| DOI | 10.4028/www.scientific.net/MSF.638-642.2068 |
| Citation | Shozo Inoue et al., 2010, Materials Science Forum, 638-642, 2068 |
| Online since | January, 2010 |
| Authors | Shozo Inoue, K. Hori, N. Sawada, N. Nakamoto, T. Namazu |
| Keywords | Joule's Heating, Magnetron Sputtering, Shape Memory Alloy Actuator, Thin Film |
| Price | US$ 28,- |
We have deposited the Ti-Ni-X films having various compositions while keeping the Ti content to be ~50at% by means of triple-source dc magnetron sputtering. All of the annealed films showed thermoelastic martensitic transformation. Ms temperature of the Ti-Ni-Pd films increased with increasing Pd content, and the highest Ms temperature of ~180˚C was attained for the Ti-23%Ni-27%Pd film. On the other hand, Ms temperature of Ti-Ni-Cu films slightly increases as Cu content increases. The transformation hysteresis is decreased rapidly down to 15~20˚C by adding Pd or Cu more than 10at%. Both ternary alloy films showed shape memory behavior during thermal cycling tests under various constant stresses. The critical stress against plastic deformation, c, of the Ti-Ni-Cu films is higher than that of the Ti-Ni-Pd films. The recoverable strain of these ternary alloy films is found to be ~2%. Actuation response by Joule's heat induced shape memory effect of Ti-Ni shape memory alloy films was slightly improved by the addition of Pd or Cu into the alloy.
