In order to further improve machining quality of superhard materials, it was presented that adds a squeeze film damper on the wheel spindle of ultrahigh speed grinder as a assistant elastic sustain to attenuate the vibration of the wheel spindle. Work principle of squeeze film damper was analyzed; the squeeze film pressure distribution was researched through simulation and damper parameters effect on damping coefficient was studied. Base on the theory research the damper was designed and experiments was done. Experimental result shows the amplitude of the grinding wheel spindle can be reduced 20% and machining quality of superhard materials can be improved 10%～20%. Research works provides a new method for superhard materials machining.