Paper Title:
3C-SiC Heteroepitaxial Growth on Inverted Silicon Pyramids (ISP)
  Abstract

3C-SiC devices are hampered by the defect density in heteroepitaxial films. Acting on the substrate, it is possible to achieve a better compliance between Si and 3C-SiC. We present here an approach to favorite defect geometrical reduction in both [ ] and [ ] directions by creating Inverted Silicon Pyramids (ISP). A study of 3C-SiC growth on ISP is reported showing benefits in the film quality and a reduction in the linear density of stacking faults. Growth on ISP leads also to a decrease in the 3C-SiC residual stress as well as in the bow of the Si/SiC system.

  Info
Periodical
Materials Science Forum (Volumes 645-648)
Edited by
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
Pages
135-138
DOI
10.4028/www.scientific.net/MSF.645-648.135
Citation
G. D'Arrigo, A. Severino, G. Milazzo, C. Bongiorno, N. Piluso, G. Abbondanza, M. Mauceri, G. Condorelli, F. La Via, "3C-SiC Heteroepitaxial Growth on Inverted Silicon Pyramids (ISP)", Materials Science Forum, Vols. 645-648, pp. 135-138, 2010
Online since
April 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Zbigniew Jurasz, Janusz Juraszek
Abstract:The results of residual stresses in biocompatible cast Ni-Cr alloys-ceramics joints with an intermediate layer with thickness of about 10μm...
1551
Authors: Bin Deng, Hong Chen Liu, Yuan Fu Yi, Chen Wang, Ning Wen, Jie Mo Tian
Abstract:The purpose of this study was to investigate the effect of different veneering porcelain types on the flexural strength of dental...
524
Authors: Guo Hong Zhang, Jian Hui Qiu, Liang Shao, Xie Fu
Abstract:Based on the novel USW method, the welds of Polylactide (PLA) - Polyformaldehyde (POM) and PLA - polymethyl methacrylate (PMMA) have been...
289
Authors: Benjamin I. Outram, Steve J. Elston
I. Physics of Liquid Crystals
Abstract:The difference between e1 and e3 parameters for flexoelectric polarization, as originally defined byMeyer, is measured for nematic liquid...
26
Authors: S. Tumminello, S. Sommadossi
Chapter 9: Diffusion in Alloys and Intermetallics
Abstract:New processes and materials are vital nowadays, since specific features of materials are essential to accomplish the more demanding...
465