Increase of SiC Substrate Resistance Induced by Annealing

Casady, Jeff B.; Schmitt, Erwin; Weber, Arnd Dietrich; Straubinger, Thomas L.; Casady, Janna R. B.; Woodin, Richard L.; Shovlin, J.; Dolny, Gary M.; Witt, T.; Sasahara, P.

Periodical

Materials Science Forum (Volumes 645 - 648)

Main Theme

Silicon Carbide and Related Materials 2009

Edited by

Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller

Pages

223-226

DOI

10.4028/www.scientific.net/MSF.645-648.223

Citation

Thomas L. Straubinger et al., 2010, Materials Science Forum, 645-648, 223

Online since

April, 2010

Authors

Thomas L. Straubinger, Richard L. Woodin, T. Witt, J. Shovlin, Gary M. Dolny, P. Sasahara, Erwin Schmitt, Arnd Dietrich Weber, Jeff B. Casady, Janna R. B. Casady

Keywords

Stacking Fault

Price

US$ 28,-

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Paper Titles

Increase of SiC Substrate Resistance Induced by Annealing