Paper Title:
Experimental Evaluation of Different Passivation Layers on the Performance of 3kV 4H-SiC BJTs
  Abstract

In this work, the electrical performance in terms of maximum current gain, ON-resistance and blocking capability has been compared for 4H-SiC BJTs passivated with different surface passivation layers. Variation in BJT performance has been correlated to densities of interface traps and fixed oxide charge, as evaluated through MOS capacitors. Six different methods were used to fabricate SiO2 surface passivation on BJT samples from the same wafer. The highest current gain was obtained for PECVD deposited SiO2 which was annealed in N2O ambient at 1100 °C during 3 hours. Variations in breakdown voltage for different surface passivations were also found, and this is attributed to differences in fixed oxide charge that can affect the optimum dose of the high voltage JTE termination.

  Info
Periodical
Materials Science Forum (Volumes 645-648)
Edited by
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
Pages
661-664
DOI
10.4028/www.scientific.net/MSF.645-648.661
Citation
R. Ghandi, M. Domeij, R. Esteve, B. Buono, A. Schöner, J. S. Han, S. Dimitrijev, S. A. Reshanov, C. M. Zetterling, M. Östling, "Experimental Evaluation of Different Passivation Layers on the Performance of 3kV 4H-SiC BJTs", Materials Science Forum, Vols. 645-648, pp. 661-664, 2010
Online since
April 2010
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