In this study, we carried out a sol-gel processing to synthesize two types of phenol resin and TEOS sol with fluoric acid as the catalysts, and fabricated the β-SiC powder by carbothermal reduction of the obtained precursor gels. The gels were observed to be cross linked between TEOS and phenol resins by FT-IR and TG-DTA. After pyrolyzed at 1000oC in Ar to obtain the precursor, to confirm the phase transition and morphologies by XRD, and SEM were measured. Finally, the light green colored SiC powder was obtained after carbothermal reduction process up to 1800oC. The residual condensed SiO(v) phase and free carbons as a role of impurities for final products using the solid type phenol resin was observed in the surface of powder by BSE.