Paper Title:
In Situ Spectroscopic Ellipsometry Study of SiC Oxidation at Low Oxygen-Partial-Pressures
  Abstract

We have investigated the oxidation process of SiC (000-1) C-face at low oxygen partial pressures using an in-situ spectroscopic ellipsometry. The oxide growth rate decreased steeply at the early stage of oxidation and then slowly decreased with increasing oxide thickness. The initial oxide growth rate was almost proportional to the oxygen partial pressure for both the polar directions. This result suggests that the initial interfacial reaction rate is constant regardless of the concentration of oxidants reaching the interface.

  Info
Periodical
Materials Science Forum (Volumes 645-648)
Edited by
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
Pages
813-816
DOI
10.4028/www.scientific.net/MSF.645-648.813
Citation
K. Kouda, Y. Hijikata, H. Yaguchi, S. Yoshida, "In Situ Spectroscopic Ellipsometry Study of SiC Oxidation at Low Oxygen-Partial-Pressures", Materials Science Forum, Vols. 645-648, pp. 813-816, 2010
Online since
April 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: A. Milewska, M.P. Hierro, J.A. Trilleros, F.J. Bolívar, F.J. Pérez
321
Authors: Aurelien Perron, Sébastien Garruchet, Olivier Politano, G. Aral, Vincent Vignal
Abstract:We investigated the oxidation of nanocrystalline aluminum surfaces by using variable charge molecular dynamics at 600 K under three oxygen...
954
Authors: Gui Xia Dong, Wei Liu
Chapter 1: Materials Properties
Abstract:The electrical and dielectric properties of Ba0.3Sr0.7TiO3 (BST), as a function of annealed temperature and oxygen partial...
1059
Authors: Yasuto Hijikata, Shuhei Yagi, Hiroyuki Yaguchi, Sadafumi Yoshida
Chapter 9: Processing Diverse
Abstract:We found that the ‘Si and C emission model’ that we proposed as an oxidation model of SiC could not reproduce the initial oxide growth rates...
833
Authors: Sang An Ha, Shun Myung Shin, Jung Yeul Yun, Jei Pil Wang
Chapter 6: Micro and Nano Technologies, Materials, Molecular and Quantum Physics Applications
Abstract:There have been many studies on the oxidation of pure iron and steel at different temperatures and pressures. D. Caplan et al....
784