Paper Title:
Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH4 and Ar-CF4 Mixtures
  Abstract

We report on the discharge gas of the electric discharge machining (EDM) for silicon carbide (SiC) single crystal. We investigated the cutting speed and the kerf loss of EDM for SiC by using three kinds discharge gases: Ar, Ar+CH4(10%) and Ar+CF4(10%). The maximum cutting speed of EDM in Ar, Ar+CH4(10%) and Ar+CF4(10%) was 0.02mm/min, 0.04 mm/min and 0.06 mm/min, respectively. The kerf loss of EDM in Ar, Ar+CH4(10%) and Ar+CF4(10%) was 490m, 430m and 470m, respectively. It is shown that cutting with a smooth edge and low kerf loss is faster by mixing CH4 or CF4 in Ar.

  Info
Periodical
Materials Science Forum (Volumes 645-648)
Edited by
Anton J. Bauer, Peter Friedrichs, Michael Krieger, Gerhard Pensl, Roland Rupp and Thomas Seyller
Pages
869-872
DOI
10.4028/www.scientific.net/MSF.645-648.869
Citation
T. Sugimoto, T. Noro, S. Yamaguchi, H. Majima, T. Kato, "Electric Discharge Machining for Silicon Carbide in Gases of Ar, Ar-CH4 and Ar-CF4 Mixtures", Materials Science Forum, Vols. 645-648, pp. 869-872, 2010
Online since
April 2010
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