Paper Title:
Aluminum Related Thermally Induced Defects in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 65-66)
Edited by
Gordon Davies
Pages
247-252
DOI
10.4028/www.scientific.net/MSF.65-66.247
Citation
N. Meilwes, J. Niklas, J. M. Spaeth, "Aluminum Related Thermally Induced Defects in Silicon", Materials Science Forum, Vols. 65-66, pp. 247-252, 1991
Online since
January 1991
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Price
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