Paper Title:
Diffusion of Groups -IV and -V Impurities in Silicon at High Donor Concentrations: A Comparison between Experimental and Theoretical Results
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 65-66)
Edited by
Gordon Davies
Pages
293-298
DOI
10.4028/www.scientific.net/MSF.65-66.293
Citation
K.K. Larsen, A. N. Larsen, "Diffusion of Groups -IV and -V Impurities in Silicon at High Donor Concentrations: A Comparison between Experimental and Theoretical Results", Materials Science Forum, Vols. 65-66, pp. 293-298, 1991
Online since
January 1991
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