Diffusion of Groups -IV and -V Impurities in Silicon at High Donor Concentrations: A Comparison between Experimental and Theoretical Results |
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| Journal | Materials Science Forum (Volumes 65 - 66) |
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| Volume | Shallow Impurities in Semiconductors IV |
| Edited by | Gordon Davies |
| Pages | 293-298 |
| DOI | 10.4028/www.scientific.net/MSF.65-66.293 |
| Citation | K.K. Larsen et al., 1991, Materials Science Forum, 65-66, 293 |
| Authors | K.K. Larsen, Arne Nylandsted Larsen |
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