Control of Shallow Boron Profile in Silicon |
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| Journal | Materials Science Forum (Volumes 65 - 66) |
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| Volume | Shallow Impurities in Semiconductors IV |
| Edited by | Gordon Davies |
| Pages | 35-40 |
| DOI | 10.4028/www.scientific.net/MSF.65-66.35 |
| Citation | Zhi Heng Lu et al., 1991, Materials Science Forum, 65-66, 35 |
| Authors | Zhi Heng Lu, Su Jie Li, Yan Luo |
| Full Paper | 
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