Paper Title:
Control of Shallow Boron Profile in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 65-66)
Edited by
Gordon Davies
Pages
35-40
DOI
10.4028/www.scientific.net/MSF.65-66.35
Citation
Z. H. Lu, S. J. Li, Y. Luo, "Control of Shallow Boron Profile in Silicon", Materials Science Forum, Vols. 65-66, pp. 35-40, 1991
Online since
January 1991
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Price
$32.00
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