Paper Title:
Effect of Ultra-Thin Pt Layer on the Preferred Orientation of AlN Films
  Abstract

Preferred orientation of AlN film has been changed from random to c-axis textured by inserting the ultra-thin Pt/AlN underlayer. The ultra-thin Pt underlayer also exhibits the same effect on the preferred orientation control of AlN film. According to intensity distributions of diffracted X-ray collected as the function of 2θ and ψ on these films, it is clearly shown that c-axis of AlN is altered from titled to the surface normal. AlN film and AlN films with underlayers demonstrate tensile stress, and it can be reduced by inserting underlayers. The effects of underlayers on the development of the preferred orientation and the reduction of stresses are similar to that of decreasing sputtering gas pressure.

  Info
Periodical
Materials Science Forum (Volumes 654-656)
Main Theme
Edited by
Jian-Feng Nie and Allan Morton
Pages
1776-1779
DOI
10.4028/www.scientific.net/MSF.654-656.1776
Citation
T. Harumoto, S. Muraishi, J. Shi, Y. Nakamura, "Effect of Ultra-Thin Pt Layer on the Preferred Orientation of AlN Films", Materials Science Forum, Vols. 654-656, pp. 1776-1779, 2010
Online since
June 2010
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Price
$32.00
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